150 mm- 200 mm VERTICAL FURNACE PROCESSING 

THERMAL PROCESSING TECHNOLOGY

Detailed Parameters of the Product

Overview

Vertical furnace with small footprint for high-quality processing.
Nano Therm's vertical furnaces are compact and requires only a small installation area and can process wide range of wafer diameters.

Applications

• annealing
• thermal oxide
• LPCVD
• wet oxidation
• dry oxidation

The Nanotherm Fabline  can process 150mm  - 200mm wafers up to 50 at a time.

Carefully selected hardware and control system features enable continuous high temperature wafer processing. The Nanotherm Fabline vertical Furnace's also has the option to be capable of 1300C operation. 

The Nanotherm’s Primary Heating and Controls are manufactured by a proprietary  source that has been producing high temperature furnaces heating systems up to 1300 °C since 1982