Connecting your business to innovative plasma solutions

Micro IIon Plasma RIE

Plasma solutions simplified

 

 

 Standard Features Include:

 

 

• Touch screen micro-processor controlled GUI (graphic user interface).
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• Fully software-configurable abort and alarm limits for all control parameters.
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• Configurable single-touch start interface for process, intended for production-oriented operation.
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• (Optional) Pneumatically opening chamber for ease of loading.
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• 150mm standard (optional 200mm,300mm) water-cooled sample platen for wafer or sample.
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• Specifically sized factory configured pocket.
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• All stainless steel chamber design.
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• Two channel Rotameter standard.
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• Vacuum control system.
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• 1OO khz 300 Watt plasma generator.
• Vacuum gauging.
• W x D x H – Footprint – L 673 mm D 220.00 mm W 215.00 mm

 

 

 Product brochure micro IIon

 

         

 

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